GENERAL INFORMATION Lanthanum Fluoride Patinal® (LaF3) is a versatile coating material for applications in the UV, VIS and IR spectral range. Its predominant application is in the UV wavelength range as a high index material for optical multilayer coatings, especially for semiconductor lithography optics.
AREAS OF APPLICATION
AR and HR coatings for laser applications in the VUV spectral range, e.g., at excimer wavelengths 157nm and 193nm, often in combination with MgF2